Microscopes

– Titan Cubed Cs corrected
– Monochromated Tecnai F20ST/STEM
– CM300UT_FEG
– CM200-FEG
– CM30T-LAB6

The most important properties of the microscopes at the NCHREM (Delft) are summarised on the table below.

Main applications:

HREM: High-Resolution Electron Microscopy: imaging atomic columns.
CTEM: Classical TEM: diffraction contrast etc.
EDX: Energy Dispersive X-ray analysis: elemental composition.
HR-EELS: High Resolution Electron Energy Loss Spectroscopy: elemental composition, type of binding.
Nanolab: In situ experiments involving a MEMS nanoreactor with gas atmosphere.
Titan cubed Cs corrected (2008) Monochromated Tecnai (2001) CM300UT-FEG (1997) CM200FEG (2000) CM30T–LAB6 (1989)
main application In situ HREM EELS nanolab HREM EDX HR-EELS HREM HREM CTEM EDX nanolab
Accelerating voltage (kV) 80-300 80-200 100-300 200 100-300
point resolution (nm) 0.08 0.19 0.17 0.20 0.23
tilt possibilities ±40˚ ±28˚ ±28˚ ±28 ±45˚
information limit (nm) 0.08 0.10 0.10 0.12 0.20
EDS, detection of elements heavier than boron boron
probe size for EDS 0.20 1.5
STEM probe size (nm) 0.13 0.20
HAADF detector yes yes
EFTEM yes yes
EELS resolution (eV) 0.7 0.1-0.6 eV at

2-0.2 nm resp.

probe size for EELS (nm) 0.13
Image camera (pixels) 2048×2048 4096×4096 1024×1024 analog
Off-axis camera 24 Im/sec 1024×1024 1024×1024 special
GIF camera 2048×2048 1024×1024
GIF camera Orius 30 Im/sec 2048×2048
Flucam 40 Im/sec 1024×1024
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